AIT Gas and liquid chemical delivery systems enable the precise delivery of specialty chemicals used in semiconductor, flat panel, and solar manufacturing steps including deposition, strip, etch, ion implant, copper plating and surface preparation.

With the advancement of Moore’s law and the demanding requirements of the semiconductor & adjacent industries; AIT is always striving to maintain technical expertise in all facets of chemical delivery. AIT’s expert technicians have more than 50 years of combined experience in this specific field, utilizing state-of-the-art equipment and techniques in a class 100 clean room. AIT has utilized its engineering expertise to develop real time testing and validation equipment to ensure 100% customer satisfaction of delivered systems.

Areas of expertise include:

• Ultra High Purity (UHP) Gas Systems
• Gas system, design, and integration
• Complete turnkey design, documentation, and integration
• Conventional VCRTM
• W-Seal & C-Seal surface mount
• ALD and high temperature applications
• Gas distribution and mixing systems


• Chemical Delivery Controls
• Design & integegration of PLC/PC controls, temperature controls, and Communication I/O


• Liquid Delivery
• Complete turnkey solutions
  • Acid and slurry delivery systems
  • Liquid bubblers, direct liquid injection, and vaporization