AIT's Microbar family of products includes a variety of liquid chemical dispense and recovery systems to meet individual chemical management needs. Systems are available for distribution of liquid chemicals to your process or collection of waste chemicals for later disposal. Ultra high purity components maintain chemical purity throughout transport and dispense processes. The electronic control system interfaces with all track equipment to provide information for the management and status of each chemical.

Areas of expertise include:

• Bulk chemical storage/dispense systems
• Available with automatic switch over for continuous chemical supply
• Pump based design eliminates direct contact with pressurized carrier gases
• Simple PLC based operator interface for control and monitoring
• Optional fire detection/suppression systems
• Can be located in remote location and feed multiple users
• Multiple enclosures available depending on the chemical compatibility

• Bulk waste chemical recovery/storage systems
• Available with automatic switch over for continuous spent chemical recovery
• Eliminates unnecessary and excessive chemical waste handling
• Simple PLC based operator interface for control and monitoring
• Optional fire detection/suppression systems
• Can be located in remote location and accept waste from multiple sources
• Multiple enclosures available depending on the chemical compatibility
• System accepts gravity drain or pumped waste

• Intermediate waste chemical recovery/storage systems
• 5 or 10 gallon systems accept waste directly from up to four process tools
• Pumps waste chemical to bulk storage system once tank reaches capacity
• Simple PLC based operator interface for control and monitoring
• System accepts gravity drain or pumped waste
• Consists of separate control and tank/pump modules