AIT’s Integrated Flow System products contain, deliver, distribute, control and recover high purity specialty gases and liquid chemicals from facility areas to and from the process tools. AIT’s gas delivery subsystems are used to deliver precise quantities of specialty gases used in key steps in the semiconductor manufacturing process, such as CVD, ALD, Epitaxial and Deposition.

Areas of expertise include:

• Mechanical (enclosures)
• Designed in accordance with industry standards
• Self closing doors
• Self closing access windows
• Dual cylinder cradles and restraints
• Non-skid flooring
• Exhaust intake filters
• Adjustable exhaust intake openings

• iPurge™ Controllers
• Intuitive windowed user interface
• Reduces operator training time
• Reduces likelihood of operator error

• Mechanical (manifolds)
• Modular design
• Allows easy configuration and customization
• Components are standard catalog items from premier UHP vendors
• Ensures short lead times and low cost basis
• Components used have industry standard dimensions
• Allows easy substitutions depending on customer preferences or vendor lead times
• Several manifold styles covering all semiconductor gases